Wafer Analyzer RAMANdrive

Analyze the whole wafer by Raman Imaging

Improve your wafer with our powerful analyzer

RAMANdrive is the specialized Raman microscope for wafer analysis equipped with our dedicated 300 mm stage. RAMANdrive gives you an ultra-fast, highest resolution analysis of the whole wafer with unique stability and accuracy

Stage Navigation System

The Nanophoton Stage Navigation System accepts data from your inspection system and use it to move the wafer to all indicated positions for a detailed analysis. The dedicated stage moves the wafer safely and with high accuracy to all areas of interest.

Stage Navigation System

Identification of particles even smaller than 100nm

RAMANdrive uses high-quality dark-field microscopy to easily localize particles, even smaller than 100 nm. Analyzing the particle is done by very high-performance Raman spectroscopy and provides a detailed material composition.

Identification of particles even smaller than 100nm

3D stress observation by powerful Raman Imaging

High quality confocal optics gives RAMANdrive high performance 3D Raman imaging capability. Stress distribution and polytype distribution can be clearly visualized in 3D with submicron resolution.

3D stress observation by powerful Raman Imaging