Wafer Analyzer RAMANdrive

Analyze the whole wafer by Raman Imaging

Performance


Performance
Spatial resolution (X / Y / Z) 350nm / 500nm / 1000nm (@532nm, 100x 0.90NA)
Spectral range
100cm-1~ (Option: 50cm-1~)
Spectral resolution (FWHM)
1.2cm-1 (@785nm, 1200gr/mm)
Spectral Pixel resolution
0.4cm-1/pixel (@785nm, 1200gr/mm)
Accuracy of peak position 0.1cm-1 (@532nm, 2400gr/mm)


 

Specification


Specification
Laser wavelength 325nm, 355nm, 488nm, 532nm, 671nm, 785nm and others
Laser illumination method
Point illumination / Line illumination
Focal length of spectrograph
550mm
Grating
150, 300, 600, 1200, 1800, 2400gr/mm (Max. 3 gratings, selectable)
Detector
TE-cooled CCD 1340 × 400 pixel format

Options
  • - Database
  • - High accuracy peak position / peak shift measurement
  • - Cooling / Heating stage
  • - Low wavenumber measurement
  • - Dark field microscopy
  • - Clean room option


 

Size and weight

Size
W1276 × D1320mm × H1350 (Including anti-vibration table)
Weight 390kg (Including anti-vibration table)

size