Wafer Analyzer RAMANdrive
High Performance Raman Imaging
Nanophoton developed a dedicated technology providing highest speed by using a unique laser line illumination system. A special illumination and detection system gets 400 spectra with only one laser shot. By moving the laser line across your sample without moving the sample, several hundred thousands of data are collected within a few minutes to complete a whole Raman image of your area of interest. The Nanophoton technology provides highest speed without limitation in resolution and accuracy.
Nanophoton developed a dedicated confocal optical system providing highest spatial and spectral resolution in 3 dimensions. The highest spatial resolution enhances the sensitivity to detect particles of less than 100 nm. Highest spectral resolution combined with the necessary positioning accuracy gives you tremendous data even for stress or polytype analysis.
- Fluorescent beads（Φ200 nm）
- 532 nm
- 100x, 0.90 NA
- 785 nm (L) | 532 nm (R)
- 1200 (L) | 2400 (R)
Raman analysis of 100 nm particle
Our highest spatial resolution enhances the sensitivity to detect tiny particles. High-quality dark-field microscopy can easily identify particles of less than 100 nm. The laser beam will then be accurately focused on it using galvanometer mirrors, producing a spectrum with a high signal-to-noise ratio that an identification can be done by a library search
Visualize stress distribution by 3D Raman Imaging
Our confocal optics allows depth profiling of transparent samples such as SiC and GaN. Here we demonstrate the cross-sectional Raman imaging of stress distribution in a SiC wafer. It easily shows that stress is reduced by the polishing process.
Photoluminescence (PL) imaging is widely used to observe the distribution of defects, impurities and GaN itself. 325 nm UV laser option is used to surpass the band gap and detect PL spectra of InGaN dots with different sizes and composition. A UV laser is also useful to measure Raman spectra at the outermost surface of samples because of its short penetration depth.