Wafer Analyzer RAMANdrive

Analyze the whole wafer by Raman Imaging

Our Stage Navigation system can upload a defect map obtained by an inspection tool.
Place the focused laser beam anywhere you want with our extended wafer stage.


Accurate and stabele 300 mm wafer stage

Large wafers of up to 300 mm can be placed on the stage. Vacuum lines are connected to small holes in channels, which allows a applied vacuum to flatten and hold the wafer on the stage. Our extended wafer stage makes it possible for the laser to access the entire exposed wafer surface. Even a tall sample also can be analyzed by placing it in the deep channel part of the stage.

Vacuum lines Wafer placement pin Deep channel for tall samples
 

Upload your areas of interest with the Stage Navigation System

The Stage Navigation System is an essential part of the RAMANdrive software, designed to save time and improve the efficiency. Simply upload your data from your regular inspection tool and RAMANdrive identifies your areas of interest and moves the wafer automatically to the requested positions for a detailed analysis. This technology works even with other samples if requested

The workflow of foreign object analysis using Stage Navigation The workflow of foreign object analysis using Stage Navigation